Linear type Dielectric barrier discharge plasma source for surface treatment

摘要

The present invention provides an apparatus for generating a dielectric barrier discharge plasma. The dielectric barrier discharge plasma generator includes: a power supply electrode including a corner extending in a first direction; A ground electrode that exposes one edge of the power supply electrode and extends in the first direction with a predetermined gap from the power supply electrode; A dielectric barrier layer interposed between the power electrode and the ground electrode and surrounding the edge of the power electrode; A plurality of nozzles formed at the ground electrode and spaced apart from each other in the first direction by injecting gas in a corner direction of the power supply electrode; And an AC power source for applying AC power to the power electrode. A dielectric barrier discharge is performed on the edge of the power source electrode.;