SYSTEM FOR MONITORING BREAKAGE OF GLASS SUBSTRATE

摘要

The purpose of the present invention is to provide a system to detect damage to a glass substrate, continuously sensing whether or not there is damage to a glass substrate in a deposition system. The present invention enables an ultrasonic sensor, an eddy current sensor, or an optical sensor to selectively be disposed inside a process chamber to detect whether or not there is a crack on the substrate in the entire process. As such, the present invention detects whether or not there is a crack using the optical sensor or the ultrasonic sensor when the substrate is chucked or dechucked, and detects whether or not there is a crack on the substrate using eddy current sensor after metal thin film is deposited on the substrate.