SYSTEM FOR MONITORING BREAKAGE OF GLASS SUBSTRATE

摘要

An object of the present invention is to provide a substrate breakage detection system that can continuously detect the damage of the glass substrate in a vapor deposition system. The present invention, disposed within the process chamber, optionally an ultrasonic sensor, an eddy current sensor or an optical sensor were to detect the presence or absence of cracks in the substrate throughout the entire process. In other words, since when the chuck / dicheok of the substrate using an optical sensor or the ultrasonic sensor detects the presence or absence and cracks, the metallic thin film is deposited on a substrate by applying the eddy current sensor to detect the substrate was cracked or not.;