UV Tunable UV LASER GENERATOR FOR ULTRA HIGH RESOLUTION MICROSCOPE LIGHT SOURCE AND GENERATING METHOD THEREOF

摘要

The purpose of the present invention is to provide a UV laser generating device capable of generating a laser with a wavelength of 200 nm or shorter, varying the wavelength thereof, having stable high-powered light emitting properties and a laser generating method thereof to provide super high resolution in hundred-nanometer class for an industrial microscope. The UV laser generating device of the present invention includes: an L-shaped vacuum chamber (100) having a pumping light input unit (110), a light output unit (120), a gas inlet (130), and a gas outlet (140); a first lens (210) inserted into the pumping light input unit (110); a filter (300) provided to the rear of a first lens (220) inserted into the pumping light input unit (110), a second lens (220) inserted into the light output unit (120), and on a rear end of the second lens; and a driving unit (500) including a source holder (400) wherein a metallic source is supported, a motor (510), and a driving shaft (520).