PENDULUM VALVE CONTROL SYSTEM, AND SEMICONDUCTOR MANUFACTURING FACILITY AND PENDULUM VALVE CONTROL METHOD USING PENDULUM VALVE CONTROL SYSTEM

摘要

The present invention relates to a pendulum valve control system, and a semiconductor manufacturing facility and a pendulum valve control method using the same. The pendulum valve control system comprises: a pendulum valve; a pendulum valve power supply unit which supplies power to the pendulum valve; and a pendulum valve controller which controls power supply to the pendulum valve and a pendulum plate. The pendulum valve controller includes a power on/off switch which switches power supply, a pendulum plate opening/closing switch which generates opening/closing signals for the pendulum plate, and a cable connection portion which delivers the opening/closing signals. According to the present invention, power supply and control are separately performed on the pendulum valve. Therefore, it is possible to confirm an alignment state of the pendulum plate with the naked eye, thereby minimizing a PM work time and preventing damage to a communication board connected to the pendulum valve.;COPYRIGHT KIPO 2017