SURFACE WAVE PLASMA APPLICATOR FOR EFFICIENT ELECTROMAGNETIC WAVE PROPAGATION

摘要

Disclosed is a surface wave plasma applicator. The surface wave plasma applicator is a surface wave discharge tube for efficient electromagnetic wave propagation. The surface wave plasma applicator includes: an outer tube formed of a dielectric material; and an inner tube inserted into the outer tube and formed of a dielectric material, wherein a spiral water path is formed between an outer surface of the inner tube and an inner surface of the outer tube so as to extend spirally along the axial direction of each tube for moving cold liquid. When using the surface wave plasma applicator, the electromagnetic wave passes only through a dielectric medium in a region where the cooling liquid does not flow, thereby minimizing the loss of electromagnetic waves transmitted into the applicator. The surface wave plasma applicator can be effectively cooled with a small amount of cooling liquid having high cooling performance and inferior dielectric characteristics.;COPYRIGHT KIPO 2017