SURFACE WAVE PLASMA APPLICATOR FOR EFFICIENT ELECTROMAGNETIC WAVE PROPAGATION

摘要

A surface wave plasma discharge tube is disclosed. Surface wave plasma discharge tubes are surface wave discharge tubes for effective electromagnetic wave transmission; And an inner tube inserted into the outer tube and made of a dielectric material and extending between the outer surface of the inner tube and the inner surface of the outer tube in a helical manner along the axial direction of each tube, Is formed. The use of such a surface wave plasma discharge tube allows the electromagnetic wave to pass only through the dielectric medium in the region where the cooling liquid does not flow to minimize the loss of electromagnetic waves transmitted into the discharge tube and to provide a small amount of cooling liquid There is an advantage that the discharge tube can be cooled effectively.;