METHOD FOR PREPARING A SAMPLE FOR MICROSTRUCTURE DIAGNOSTICS AND SAMPLE FOR MICROSTRUCTURE DIAGNOSTICS

摘要

The present invention relates to a method to manufacture a sample for diagnosis of a microstructure. A sample part (PA) is manufactured in a sample body by material ablation processing. Afterwards, a test area is formed in the sample part, and the test area includes a target area (ZB) to be tested. The method comprises: a terracing zone (TBZ) generating step of generating a terracing zone (TBZ) including the target area of at least one surface of the sample part, and generating at least one notch (K) including franks (F1, F2) extended obliquely to the surface, beside the target area through material ablation beam processing to generate the terracing zone; and a step of ablating a material of the sample part (PA) in the terracing zone (TBZ) through an ion beam (IB) emitted under grazing incidence to the surface in an extending direction of the notch (K) to place the target area (ZB) behind the notch (K) in an emitting direction of the ion beam (IB).