JIG APPARATUS TO INSPECT DEFECT OF SUBSTRATE USING OPTICAL COHERENCE TOMOGRAPHY SYSTEM

摘要

According to the present invention, a jig apparatus to inspect a defect of a substrate using optical coherence tomography (OCT) system comprises: a first jig member including a mounting portion where a measured material is placed on an upper portion thereof, wherein the mounting portion is formed of a curved surface with a predetermined curvature; a second jig member arranged on the first jig member to face each other based on the measured material, and a compression portion having the curvature same as the mounting portion of the first jig member, and compressing the measured material; and a lens member refracting light scanned from the OCT system, allowing the refracted light to transmit the second jig member, thereby allowing the refracted light to vertically be scanned to the measured material.;COPYRIGHT KIPO 2017