APPARATUS AND METHOD FOR GENERATING LOW-TEMPERATURE PLASMA USING PULSE MICROWAVES

摘要

Disclosed are an apparatus and a method for generating low-temperature plasma using pulse microwaves. The apparatus for generating low-temperature plasma using pulse microwaves comprises a power oscillator, a signal generator, a pulse-mode power amplifier and a plasma generator, wherein the power amplifier operating in a pulse mode is connected to an output terminal of the power oscillator or the signal generator, and the plasma generator generating plasma is connected to an output terminal of the pulse-mode power amplifier. The pulse-mode power amplifier supplies a pulse-wave voltage of any one among a square wave, a saw-tooth wave and a sine wave from the signal generator to a gate terminal of a device when the power amplifier in a microwave band operates in a pulse mode. The signal generator causes a voltage (VB) to be present during a pulse sleep time when supplying the pulse-wave voltage to the gate terminal of the pulse-mode power amplifier to produce microwave power (PB) during the pulse sleep time. Moreover, the signal generator changes the pulse repetition frequency, the pulse width and the pulse shape of a pulse signal input to the gate terminal of the pulse-mode power amplifier, so as to adjust the temperature and characteristics of plasma, and lowers the average power over the pulse width time as the pulse width of pulse waves decreases, thereby lowering the plasma temperature. The pulse-mode power amplifier and the pulse-mode power amplifier generate plasma having a low temperature characteristic of 40C or less even in a high output high frequency band of 300 MHz to 40 GHz band, and the plasma obtained by using the pulse-mode power amplifier is used to sterilize dental germs for dental treatment or as medical microwave plasma.;COPYRIGHT KIPO 2017