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DCALGA Semiconductor device and method of forming DCALGA package using semiconductor die with MICRO PILLARS

机译:DCALGA半导体器件和使用带有MICRO PILLARS的半导体管芯形成DCAL​​GA封装的方法

摘要

A semiconductor device includes a first semiconductor die placed on a substrate. A plurality of complex interconnect structures are formed on the semiconductor die. The complex interconnect structures include an insoluble conductive pillar and a soluble layer formed on the insoluble conductive pillar. The soluble layer is reflowed to connect the first semiconductor die to a conductive layer of the substrate. The insoluble conductive pillar is not melted while being reflowed so that a solder resist does not need to be formed on the substrate. A sealant is deposited around the first semiconductor die and the complex interconnect structures. The sealant flows between the substrate and an active surface of the first semiconductor die. A second semiconductor die is placed on the substrate in a position adjacent to the first semiconductor die. A heat spreader is placed on the first semiconductor die. A part of the sealant is removed to expose the heat spreader.
机译:半导体器件包括放置在衬底上的第一半导体管芯。在半导体管芯上形成多个复杂的互连结构。复杂的互连结构包括不溶性导电柱和在不溶性导电柱上形成的可溶层。可溶性层被回流以将第一半导体管芯连接到衬底的导电层。不溶性导电柱在回流时不会熔化,因此不需要在基板上形成阻焊剂。密封剂沉积在第一半导体管芯和复杂的互连结构周围。密封剂在衬底与第一半导体管芯的有源表面之间流动。第二半导体管芯在与第一半导体管芯相邻的位置放置在基板上。散热器被放置在第一半导体管芯上。去除密封剂的一部分以暴露散热器。

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