APPARATUS AND METHOD TO MEASURE ALIGNMENT OF SEPARATED MULTI-AXIS EQUIPMENT

摘要

The present invention relates to an apparatus to measure an alignment of separated multi-axis equipment, measuring an alignment state of a curved surface of a second support with respect to a first support of separated multi-axis equipment including the first support multi-axially driven to an object to be processed with a curved surface; and the second support separated from the first support having a curved surface corresponding to the curved supply of the object to be processed to multi-axially be driven to the object to be processed. According to the present invention, the apparatus comprises: a reference shaft supported to the first support to form a reference point; a rotary bar combined with the reference shaft to be able to rotate on the reference shaft, and extended towards the second support; and a measurement module combined with the end part of the rotary bar to measure a distance between the curved surface of the second support and the reference point in accordance with rotation of the rotary bar to measure an alignment state of the second support with respect to the first support. As such, reliability of an alignment measurement result of the separated multi-axis equipment is able to be enhanced.;COPYRIGHT KIPO 2017