CVD- PVD- CVD OR PVD REACTOR FOR COATING LARGE-AREA SUBSTRATES

摘要

The present invention comprises a gas inlet member (7) having a housing (1, 2) and a gas outlet face (7 ') which is fixed to the housing and which includes gas outlet openings (8) Or PVD-coating apparatus with a module 23 for carrying out the process of the present invention, the module being mounted at a plurality of mounting positions 6 ', at which time temperature control means 9 are provided and by means of said temperature control means said gas inlet member 7 is substantially fixed to the temperature of the housing 1, 2 Wherein the temperature means is adjustable from a first temperature to a second temperature which is different from the housing temperature and wherein the means for fixing 13, 14 comprise force transmission means 26.1, 26.2, 26.3, 26.4, 27, 28, And the force transmitting means are deformed when the size of the module (23) caused by the temperature adjustment changes, or It is moved relative to the furnace. The module comprises a holding device (3) in which the gas inlet member (7) is fixed by a plurality of mounting elements (6) distributed over the entire horizontal extending surface, And the holding device is fixed to the housing 1 only by the force transmission means 26.1, 26.2, 26.3, 26.4, 27, 28, 29 at its own edge.