DATA EVALUATING DEVICE OF OPTICAL MEASURING DEVICE AND DATA EVALUATING METHOD OF OPTICAL MEASURING DEVICE

摘要

The present invention relates to a data evaluation apparatus for an optical measuring apparatus which can measure the measurement data according to measurement of an object in an optical measuring apparatus for measuring an object placed on a table while moving the measuring member in a gantry, And a data evaluation method.To this end, a data evaluation method of an optical measuring apparatus includes a measurement data transmitted from a measurement member with respect to a measurement interval, a data storage unit in which residual vibrations remaining in the base are stored in association with the measurement data, And a data comparison unit for comparing the remaining vibration stored in the data storage unit with the measurement data that is out of the error range when the measurement data compared through the data comparison unit out of the error range out of the measurement data stored in the data storage unit, The residual vibration generated in the table through the vibration comparing unit and the vibration comparing unit comparing the remaining vibration stored in the storage unit with the predetermined reference vibration stored in the data storing unit in association with the measurement data out of the error range Error notification that displays error information of the measurement data if the error range is exceeded It includes.