SAW SAW Resonator having negative profile Metal Structure and the Manufacturing Method thefeof

摘要

Disclosed is a surface acoustic wave (SAW) resonator. The SAW resonator according to the present invention comprises: a piezoelectric substrate; a plurality of metal structures formed on an upper surface of the piezoelectric substrate and having a negative profile; and a temperature compensating thin film surrounding the upper surface of the piezoelectric substrate and the plurality of metal structures. Therefore, the SAW resonator according to the present invention has a frequency characteristic insensitive to change in the profile and has a high antiresonance Q value characteristic.