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NON-CONTACT TYPE SYSTEM AND METHOD FOR MEASURING THICKNESS USING LASER

机译:非接触式激光测厚系统及测厚方法

摘要

The present invention relates to a non-contact type thickness measurement system using laser, and a non-contact type thickness measurement method using laser. More specifically, the non-contact type thickness measurement system comprises: a light radiation unit to generate laser to be radiated to an object by using a light source; a reception unit receiving a primary photoacoustic signal generated by a direct collision between the laser and a surface of the object and receiving a secondary photoacoustic signal generated by the laser while the laser is proceeded inside the object; and a measurement unit measuring received response waveforms of the primary photoacoustic signal and the secondary photoacoustic signal; and an analysis unit analyzing a response characteristic displayed by the measured response waveform to derive thickness of the object. The present invention analyzes tendency of the primary photoacoustic signal and the secondary photoacoustic signal generated by radiating the laser to the object in order to measure the thickness of the object.
机译:本发明涉及一种使用激光的非接触式厚度测量系统,以及一种使用激光的非接触式厚度测量方法。更具体地,非接触式厚度测量系统包括:光辐射单元,以通过使用光源产生要辐射到物体的激光;以及接收单元,其接收由激光与物体表面之间的直接碰撞产生的初级光声信号,并在激光在物体内部行进时接收由激光产生的次级光声信号;测量单元,其测量所述一次光声信号和二次光声信号的接收响应波形;分析单元分析由测得的响应波形显示的响应特性,以得出物体的厚度。为了测量物体的厚度,本发明分析了通过将激光辐射到物体而产生的一次光声信号和二次光声信号的趋势。

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