MEMS Micro-Electro-Mechanical-System relay for electric exploding initiator safety and Detonator using the relay

摘要

Disclosed is a MEMS relay capable of ensuring the safety of a foil explosion-type detonator by a high voltage and capable of lowering a full width voltage and an explosion device equipped with the same. The present invention is based on the fact that the gap between the micro-stacked glass substrate and the dielectric layer in the MEMS process and the gap between the copper-based ceiling electrode and the nickel-based plate-like contact on the silicon substrate are different from each other by electrostatic force at a predetermined pull- (99.9% probability probability voltage) and the explosion voltage (probability probability probability of 0.1% or less) of the electric explosion-proof pipe. If the pull-in voltage is set higher than the desired safety voltage by the proper shape and arrangement combination of the structure, the current does not flow in the explosion pipe at the voltage lower than the safety voltage. Accordingly, the desired safety condition can be ensured irrespective of the characteristics of the electric detonating tube such as the foil explosion-proof detonator. In addition, it is possible to manufacture a low-energy explosion-proof pipe which can be exploited with relatively little electric energy because the short-circuit voltage can be lowered.