YTTRIUM FLUORIDE SPRAYED COATING SPRAY MATERIAL THEREFOR AND CORROSION RESISTANT COATING INCLUDING SPRAYED COATING

摘要

A yttrium fluoride sprayed coating having a thickness of 10-500 [mu] m, an oxygen concentration of 1-6 wt%, and a hardness of 350-470 HV is deposited on the substrate surface. The yttrium fluoride sprayed coating exhibits excellent corrosion resistance in a halogen-based gas atmosphere or a halogen-based gas plasma atmosphere and functions to protect the substrate from damage by acid penetration during acid scrubbing, Thereby minimizing particle generation.