INSPECTION DEVICE FOR SPATIAL LIGHT MODULATOR ILLUMINATING OPTICAL SYSTEM EXPOSURE DEVICE INSPECTING METHOD METHOD FOR ADJUSTING ILLUMINATING OPTICAL SYSTEM ILLUMINATING METHOD EXPOSURE METHOD AND DEVICE MANUFACTURING METHOD

摘要

For example, the reflectance of the mirror element of the spatial light modulator disposed in the optical path of the illumination optical system. An inspection apparatus (10) for inspecting a spatial light modulator having a plurality of individually controlled optical elements arranged in two dimensions. A conjugate optical system (11, 12) arranged on the optically downstream side of the spatial light modulator and forming an optically conjugate conjugate plane with an arrangement plane in which a plurality of optical elements are arranged, And an inspection section 14 for inspecting the optical characteristics of the plurality of optical elements based on the detection results of the optical detectors.