Fabrication method of polymer embedded silicon nanowire solar cells

摘要

The purpose of the present invention is to provide a manufacturing method of a polymer solar cell to which a silicon nanowire is inserted, wherein a polymer covering a nanowire is made of a flexible material, and a substrate and the polymer are easily separated to reduce total manufacturing costs. To this end, the manufacturing method of a polymer solar cell to which a silicon nanowire is inserted comprises: a substrate preparing step of preparing a silicon substrate including a base and an emitter layer formed on an upper end of the base; a mask forming step of forming a nano pattern on an upper end of the silicon substrate; a nanowire manufacturing step of forming a nanowire having the emitter layer formed on an end of the substrate through wet etching; a first polymer layer forming step of forming a first polymer layer on an upper end of the substrate having the nanowire; a partial first polymer layer removing step of removing remaining parts of the first polymer layer except for a part that is in contact with the base; a second polymer layer forming step of forming a second polymer layer that has the height of accommodating the nanowire and that is made of a different material from the first polymer layer, on the upper end of the substrate; a partial second polymer layer removing step of removing a part of an upper end of the second polymer layer such that an end of the nanowire protrudes from the second polymer layer; a first polymer layer removing step of removing the first polymer layer between the second polymer layer and the base; a separation step of separating a lower end part of the nanowire from the base; and an electrode forming step of forming an electrode layer on an upper end and a lower end of the second polymer layer, respectively.