2 METHOD FOR PRODUCING A SUBSTRATE HAVING A COLORED INTERFERENCE FILTER LAYER SAID SUBSTRATE COMPRISING A COLORED INTERFERENCE FILTER LAYER AND AN ARRAY COMPRISING AT LEAST TWO OF SAID SUBSTRATES

摘要

The present invention relates to a method of producing a substrate with a colored interfering filter layer comprising a polycrystalline metal oxide (s), in particular via physical or chemical vapor deposition using a sputtering gas, using a coating apparatus, wherein the polycrystalline metal oxide Two or more, in particular six or more, coating layers are deposited from the vapor phase upwards and downwards, and the average thickness of each coating layer is in the range of about 50 nm to 350 nm, especially in the range of about 90 nm to 210 nm, The average atomic content based on the percentage of one or more metals, in particular all individual metals, contained in all coating layers is less than +/- 20 atomic%, preferably less than +/- 10 atomic%, from the average compositional ratio of the respective metals in the interference filter layer, Particularly preferably +/- 5 atomic% or less, and 100 atomic% represents the sum of all the metals contained in the layer. The invention further relates to a colored substrate obtainable by this method and to an array comprising such a plurality of substrates.