CONTROLLING DYNAMIC AND THERMAL LOADS ON LASER BEAM POSITIONING SYSTEM TO ACHIEVE HIGH THROUGHPUT LASER PROCESSING OF WORKPIECE FEATURES

摘要

The present invention is directed to a method of achieving high-throughput laser processing of a workpiece feature (18) arranged in a dense pattern, the method comprising the steps of: And processing inaccuracies and quality deterioration of the workpiece features resulting from dynamic and thermal loading on the optical elements. The preferred embodiment includes a non-inertial optical deflector of the type of acoustic-light beam deflector (AOD) or electro-optical deflector (EOD), a head portion 30 of galvanometer system, and a laser beam 16 And a linear stage 34 cooperating to position the laser beam (e.g.