The microwave radiating mechanism 43 has a transmission path 44 for transmitting microwaves and an antenna section 45 for radiating microwaves transmitted through the microwave transmission path 44 into the chamber 1, 45 has an antenna 81 in which a slot 131 for radiating a microwave is formed and a dielectric member 110b for transmitting a microwave radiated from the antenna 81 and having a surface wave formed on the surface thereof, the length of the slot 131, the inner wall and the dielectric comprising the surface and the interior of the member (110b), having a closed circuit (C), the surface current and the displacement current flows, a closed circuit (C), if one of the microwave wavelength λ 0 a, nλ 0 ± δ is such that (n is a positive integer number, δ is comprises a fine adjustment component (0)).
展开▼
