Chamber unit for real time detecting temperature of laser irradiated area and laser processing system including the chamber unit

摘要

A chamber unit for real-time temperature measurement of a laser irradiation area and a laser processing system comprising the same are disclosed. The chamber unit includes a base plate, a cover plate provided to cover the base plate, a first window provided on the cover plate and through which the laser beam is transmitted, and a second window provided on the cover plate so as to be spaced apart from the first window And a second window through which a measurement beam for temperature measurement for a specific region of the object is transmitted.;