APPARATUS AND METHOD FOR SINTERING NANOPARTICLE USING LOCALIZED SURFACE PLASMON RESONANCE

摘要

The present invention is to provide an apparatus and a method for sintering a nanoparticle using localized surface plasmon resonance, in which nanoparticles are sintered without damaging surrounding materials through selective absorption effects of nanoparticles. To achieve this, according to the present invention, a light source having an absorption spectrum wavelength of metal nanoparticles is output onto a substrate on which the metal nanoparticles of which an absorption spectrum has a local surface plasmon resonance frequency are dispersed, so that the metal nanoparticles are sintered. As a result, the present invention is capable of sintering the nanoparticles without damaging the surrounding materials through selective absorption effects of the nanoparticles and enables sintering at a relatively low temperature so that patterning and joining are possible on a substrate which is not suitable for high temperatures. In addition, the present invention allows only metal nanoparticles to selectively reach higher temperatures without damaging the substrate, and thus the sintering of the metal nanoparticles is facilitated and the contact storage in a sintered region is reduced, thereby improving electrical conductivity and thermal conductivity.;COPYRIGHT KIPO 2017