POROUS SILICON BASED ANODE ACTIVE MATERIAL PREPARATION METHOD THEREOF AND LITHIUM SECONDARY BATTERY COMPRISING THE SAME

摘要

According to an embodiment of the present invention, there is provided a method of manufacturing a semiconductor device, which comprises crystalline silicon-based particles including a plurality of pores on the surface or on the surface or inside of the crystalline silicon-based particles, Wherein the spacing of the space is 20 to 200 nm when measured at the surface, and a method of manufacturing the porous silicon based anode active material. The porous silicon based anode active material according to an embodiment of the present invention can reduce the mechanical stress due to the expansion and contraction of the electrode during charging / discharging of the lithium secondary battery by adjusting the spacing of the space. In addition, since the volume expansion caused by charging and discharging of the lithium secondary battery is concentrated on the pores of the negative electrode active material, the volume expansion can be efficiently controlled while maintaining the shape and structure of the crystalline silicon-based particles Therefore, the lifetime characteristics of the lithium secondary battery can be further improved.