APPARATUS FOR INTENSE PULSED LIGHT SINTERING AND MANUFATURING METHOD OF CONDUCTIVE-FILM USING THE SAME

摘要

A light sintering apparatus is provided. The light sintering apparatus has a structure in which light emitted from the first upper-end light-emitting portion is disposed in a left upper side of a position where a first upper light-emitting portion that emits light as a material to be processed is provided, A first upper main winding part that reflects in the upper surface direction and a right upper part of the position where the first upper light emitting part is provided and is convex upwardly so that light emitted from the first upper light emitting part is directed upward And a first lower light emitting part for emitting light to the object to be processed, the light emitted from the lower light emitting part is incident on the substrate Wherein the right end of the first upper main bend portion and the left end of the second upper main bend portion form a contact, A line extending in the longitudinal direction cross-sectional center of the first upper light emitting portion may be perpendicular to the substrate on which the workpiece is formed.