/ METHOD AND APPARATUS FOR MEASURING THE POWER OF A POWER GENERATOR WHILE OPERATING IN VARIABLE FREQUENCY MODE AND/OR WHILE OPERATING IN PULSING MODE

摘要

A method for measuring a characteristic of a power applied to a plasma processing chamber when the power generator operates in a pulse mode and when the power generator operates in a variable frequency mode and simultaneously when the power generator operates in a pulse mode and a variable frequency mode, Devices are described.;