SYSTEM FOR CONTROLLING NITROGEN GAS PURGING IN LOAD PORT AND METHOD FOR COTROLLING THE NITROGEN GAS PURGING

摘要

The present invention relates to a nitrogen purge control system for a load port and a nitrogen purge control method for a load port, the main control unit including a monitor and including a main PC, for inputting, editing and storing a recipe of a nitrogen gas supply; A plurality of unit control units for receiving recipe data from the main control unit and generating control signals; And a plurality of load ports connected to the plurality of unit control units and in which nitrogen gas is introduced and discharged according to the control signal, wherein the main control unit inputs, edits, and stores a recipe of the nitrogen gas supply Recipe configuration step; Transferring data on the recipe to a plurality of unit control units, respectively; Wherein each of the plurality of unit control units controls the flow rate of the nitrogen gas according to the recipe; And nitrogen gas whose flow rate is controlled are respectively transmitted to a corresponding plurality of load ports to perform nitrogen gas purging.