G-M GEIGER-MULLER COUNTER FOR RADIATION MEASUREMENT MANUFACTURED BY SPUTTERING AND ITS MANUFACTURING METHOD

摘要

A GM counter tube for radiation measurement manufactured by thin film deposition and a manufacturing method thereof are disclosed. The present invention relates to a method for forming a cathode-cathode-side surface having a high work function so as to suppress a chemical reaction and an electron avalanche of a filling gas such as a halogen gas filled in a GM counter tube by vaporizing and heat- And a high quality plateau characteristic is exhibited.