Pressure sensing device having dirac material and method for operating the same

摘要

Provided are a pressure sensing device having a Dirac material and a method of operating the same. The pressure sensing device includes the Dirac material disposed on a substrate having a band structure in which Dirac cones meet at a Dirac point. A source electrode and a drain electrode are respectively connected to a Dirac material pattern. A spacer layer including a cavity on the Dirac material pattern is disposed on the substrate. A gate electrode overlapping the Dirac material pattern is disposed on an upper portion of the cavity.;COPYRIGHT KIPO 2017