A method for the wet chemical structuring of superconducting, ferromagnetic or ferroelectric oxides and its use

摘要

A method for the wet chemical structuring of superconducting, ferromagnetic and / or ferroelectric oxides in the case of the– a partially covered with a mask oxide - surface of gadolinium - barium - copper oxide or praseodymium - barium - copper oxide ferromagnetic oxides - and / or ferroelectric manganates and / or a ferroelectric multilayer system is produced by the surface with a resist layer is covered with an electron beam and the irradiated or of the non-irradiated part of the resist layer is removed,– with an etching solution at a ph - value of 0 to 2 and at temperatures between 20°C. and 100°C, is brought into contact with the.