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Method for measuring a test object with improved measuring accuracy and device
Method for measuring a test object with improved measuring accuracy and device
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机译:测量精度提高的被测物的测量方法及装置
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摘要
The present invention relates to a method for determining a property of a measurement object (14), in particular a dimensional property of the measurement object (14), comprising the steps of providing a device (10), in particular a profile projector, with a measurement slide (12), wherein the Measuring object carrier (12) has a support surface (13) for arranging the measurement object (14), and with an image acquisition device (18), wherein the image acquisition device (18) comprises an image sensor (20) and a lens (22) for imaging the measurement object (14). on the image sensor (20), wherein the lens (22) is a two-sided telecentric lens (22), and wherein the image sensor (20) relative to the support surface (13) is movable; arranging the measurement object (14) on the support surface (13), moving the image sensor (20) relative to the measurement object (14) in an image-side telecentric region (44) of the objective (22) in such a way that an image sensor (20) the focal plane (50) imaged by means of the objective (22) is moved through a section of an object-side telecentric region (46) of the objective (22) which at least partially has the measurement object (14); and acquiring a plurality of images of the measurement object (14) by the image acquisition device (18) during the step of moving the image sensor (20) relative to the measurement object (14). Furthermore, a device (10), in particular an improved profile projector, is provided.
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