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Method for measuring a test object with improved measuring accuracy and device

机译:测量精度提高的被测物的测量方法及装置

摘要

The present invention relates to a method for determining a property of a measurement object (14), in particular a dimensional property of the measurement object (14), comprising the steps of providing a device (10), in particular a profile projector, with a measurement slide (12), wherein the Measuring object carrier (12) has a support surface (13) for arranging the measurement object (14), and with an image acquisition device (18), wherein the image acquisition device (18) comprises an image sensor (20) and a lens (22) for imaging the measurement object (14). on the image sensor (20), wherein the lens (22) is a two-sided telecentric lens (22), and wherein the image sensor (20) relative to the support surface (13) is movable; arranging the measurement object (14) on the support surface (13), moving the image sensor (20) relative to the measurement object (14) in an image-side telecentric region (44) of the objective (22) in such a way that an image sensor (20) the focal plane (50) imaged by means of the objective (22) is moved through a section of an object-side telecentric region (46) of the objective (22) which at least partially has the measurement object (14); and acquiring a plurality of images of the measurement object (14) by the image acquisition device (18) during the step of moving the image sensor (20) relative to the measurement object (14). Furthermore, a device (10), in particular an improved profile projector, is provided.
机译:本发明涉及一种用于确定测量对象(14)的特性,特别是测量对象(14)的尺寸特性的方法,该方法包括以下步骤:为设备(10),特别是轮廓投影仪提供测量滑块(12),其中,测量对象载体(12)具有用于布置测量对象(14)的支撑表面(13),并带有图像采集设备(18),其中图像采集设备(18)包括图像传感器(20)和用于对测量对象(14)成像的透镜(22)。在图像传感器(20)上,其中透镜(22)是双面远心​​透镜(22),并且其中图像传感器(20)相对于支撑表面(13)是可移动的;将测量对象(14)布置在支撑表面(13)上,以这种方式使图像传感器(20)相对于测量对象(14)在物镜(22)的像侧远心区域(44)中移动借助于物镜(22)成像的焦平面(50)的图像传感器(20)移动通过物镜(22)的物侧远心区域(46)的一部分,该部分至少部分地具有测量值对象(14);在使图像传感器(20)相对于被测物(14)移动的步骤中,由图像获取装置(18)获取被测物(14)的多个图像。此外,提供了一种装置(10),特别是一种改进的轮廓投影仪。

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