Method and device for measuring a test object with improved measuring accuracy

摘要

Method (100) for determining a property of a measurement object (14), in particular a dimensional property of the measurement object (14), comprising the following steps: providing (102) a device (10) with a measurement object carrier (12), wherein the measurement object carrier ( 12) has a support surface (13) for arranging the measurement object (14), and with an image acquisition device (18), wherein the image acquisition device (18) comprises an image sensor (20) and a lens (22) for imaging the measurement object (14) on the Image sensor (20), wherein the objective (22) is a double-sided telecentric objective (22), and wherein the image sensor (20) is movable relative to the supporting surface (13); arranging (108) the measuring object (14) on the Supporting surface (13); moving (110) of the image sensor relative to the measurement object (14) in an image-side telecentric region (44) of the objective (22) such that a focal plane (15) imaged on the image sensor (20) by means of the objective (22) 50) durc h) moving a portion of an object-side telecentric region (46) of the objective (22) at least partially; measuring (112) a plurality of images of the measurement object (14) by means of the image capture device (18) during the step of moving of the image sensor (20) relative to the measurement object (14).