Pivoting device for a micromirror and illuminating device with the aid of a pivoting device for a micromirror

摘要

The present invention provides a pivoting device, in particular a pivoting device for a micromirror. A fixed base frame is directly or indirectly via an intermediate frame with a pivotable carrier element. Between the base frame and support element or base frame and the intermediate frame, as well as intermediate frame and support element are in each case a spring elements arranged with flexural springs. The use of the torsion springs makes it possible in this case to a good thermal coupling between the individual components as well as an increase in the robustness. The pivoting device may in this case, in particular be designed as a mems.