A method of impedance matching a load to the output impedance of a power generator and impedance matching arrangement

摘要

A method of impedance matching a load (28) to the output impedance of a power generator (40) comprises the steps of: a. Generating a power by means of a power generator (40); b. Supplying the power to a load (28) via an impedance matching device (10) having at least one reactance (18, 20, 22) variable via an actuator (12, 14, 16), the impedance matching device (10) measuring the load impedance (27) at the Input of the load (18) converts to a transformed load impedance (29) at the input of the impedance matching device (10); c. Detecting or determining a power reflected on the load (28) or at least one magnitude related thereto; d. Based on the reflected power or the at least one related quantity, checking for mismatch; e. Determining a trajectory (50) in a complex load plane, in particular in the Smith diagram (60), according to at least one predetermined criterion; f. Controlling the at least one actuator (12, 14, 16) so that the transformed load impedance (29) follows the trajectory (50).