Sensor element, method for producing a sensor element, detection device and method for producing a detection device

摘要

A sensor element is provided, comprising: a semiconductor base element (2) having a first main surface (2A) and a second main surface (2B) opposite to the first main surface (2A), and having a void Structure (9, 10) formed on sides of the second major surface (2B); and a detection element (4, 5) formed on sides of the first main surface (2A) in a region where the cavity structure (9, 10) is formed, the second main surface (2B) of the semiconductor base element (2 ) has a convex and concave shaped portion (12), and a tip of a convex portion of the convex and concave shaped portion (12) has a curved shape.