Chromatic confocal sensor and measuring method

摘要

There is provided a chromatic confocal sensor including: a first light source emitting measurement light including a plurality of light beams having different wavelengths; a second light source emitting a visible light beam having a predetermined wavelength; an optical head that causes incident light to converge at a focal position corresponding to a wavelength of the incident light and to output reflected light reflected from an object to be measured at the focal position; a position calculating section that calculates a position of the object to be measured based on the reflection light output from the optical head; and a switching section that selectively switches between a first operation in which only the measurement light enters the optical head and a second operation in which at least the visible light beam enters the optical head.