PROBE FOR ATOMIC FORCE MICROSCOPY WITH LOW DIMENSIONS AND ATOMIC FORCE MICROSCOPE COMPRISING SUCH A PROBE

摘要

A probe for atomic force microscopy comprising a tip for atomic force microscopy (PT1) oriented in a so-called longitudinal direction (y) and projecting from an edge (B) of a substrate (S1) in said longitudinal direction, characterized in said tip is arranged at one end of a shuttle (PJ1) fixed to said substrate at least via a first (ET) and a second (R, RA) structure, said support, at least said first support structure being a flexible structure, extending in a so-called transverse direction (x), perpendicular to said longitudinal direction and anchored to the substrate by at least one mechanical connection in said transverse direction, said support structures being adapted to allow the shuttle to move in the longitudinal direction. Atomic force microscope comprising at least one such probe.