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Voltage-controlled magnetic anisotropy switching device using an external ferromagnetic biasing film

机译:使用外部铁磁偏置膜的压控磁各向异性开关装置

摘要

A voltage-controlled magnetic anisotropy (VCMA) switching device (and method of manufacture/use) comprising an external ferromagnetic biasing film, and embodiment in the form of a Magnetoresistive Random Access Memory MRAM in particular a magneto-electrical RAM MeRAM) memory device. The MRAM device includes a substrate, at least one magnetic tunnel junction (MTJ) stack 704 disposed thereon the substrate 702, wherein the MTJ stack 704 comprises a tunnel barrier layer 708 (e.g MgO) between a first ferromagnetic layer (e.g CoFeB) having a fixed magnetization (layer 706) and a second ferromagnetic layer (CoFeB) having unfixed magnetization (magnetic free layer 710), and a magnet 712 (which may be a permanent magnet) disposed adjacent to the second ferromagnetic layer. The magnet 712 may comprise a ferromagnetic biasing layer formed horizontally parallel to the substrate and aligned with the second ferromagnetic layer 710, and may comprise of a hard ferromagnetic layer (CoPt Cobalt Platinum ) or a soft ferromagnetic layer (NiFe Nickel Iron) pinned by an antiferromagnet. The first and second ferromagnetic layer may also comprise CoFeB layer. The magnetization of the second ferromagnetic layer precesses about a bias field from the magnet such that a magnetic polarity of the second ferromagnetic layer is reversed when an electrical bias field (voltage) is applied to the MTJ stack. The Magnetoresistive RAM (MeRAM) uses Tunneling Magnetoresistance (TMR) effect for readout, however the writing of information is performed by voltage controlled magnetic anisotropy VCMA of the tunnel barrier (e.g providing perpendicular anisotropy) as opposed to current controlled spin transfer torque STT or spin orbit torque SOT mechanisms. The emphasis is therefore on the application of a voltage via an electric field across the MTJ device, thus reducing the power requirements of memory devices.
机译:包括外部铁磁偏置膜的压控磁各向异性(VCMA)切换装置(及其制造/使用方法),以及以磁阻随机存取存储器MRAM(特别是磁电RAM MeRAM)形式的实施例。 MRAM器件包括衬底,在衬底702上设置在其上的至少一个磁性隧道结(MTJ)堆叠704,其中MTJ堆叠704在具有铁氧体的第一铁磁层(例如CoFeB)之间包括隧道势垒层708(例如MgO)。固定磁化强度(层706)和具有未固定磁化强度的第二铁磁层(CoFeB)(磁性自由层710),以及与第二铁磁层相邻设置的磁体712(可以是永磁体)。磁体712可以包括水平平行于基板并且与第二铁磁层710对准地形成的铁磁偏置层,并且可以包括由铁氧体钉扎的硬铁磁层(CoPt钴铂)或软铁磁层(NiFe镍铁)。反铁磁体。第一和第二铁磁层还可以包括CoFeB层。第二铁磁层的磁化围绕来自磁体的偏置场进动,使得当将电偏置场(电压)施加到MTJ堆叠时,第二铁磁层的磁极性反转。磁阻RAM(MeRAM)使用隧道磁阻(TMR)效应进行读出,但是信息的写入是通过隧道势垒的电压控制磁各向异性VCMA(例如提供垂直各向异性)来进行的,与电流控制的自旋传递扭矩STT或自旋相反轨道扭矩SOT机制。因此,重点在于通过跨MTJ器件的电场施加电压,从而降低存储器件的功率需求。

著录项

  • 公开/公告号GB2539102A

    专利类型

  • 公开/公告日2016-12-07

    原文格式PDF

  • 申请/专利权人 HGST NETHERLANDS B.V.;

    申请/专利号GB20160009565

  • 发明设计人 JORDAN KATINE;

    申请日2016-06-01

  • 分类号G11C11/16;H01L43/02;H01L43/08;

  • 国家 GB

  • 入库时间 2022-08-21 13:20:39

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