A switching apparatus including gating circuitry for actuating micro-electromechanical system (MEMS) switches

摘要

A switching apparatus (30), as may be configured to actuate stacked MEMS switches, includes a switching circuitry (34) including a MEMS switch (36) having a beam made up of a first movable actuator (17) and a second movable actuator (19) electrically connected by a common connector (20) and arranged to selectively establish an electrical current path through the first and second movable actuators (17 and 19) in response to a gate (22) control signal applied to the gates (22) of the switch to actuate the movable actuators (17). The apparatus (30) further includes a gating circuitry (32) to generate the gate (22) control signal applied to gates (22) of the switch. The gating circuitry (32) includes a driver channel (40) electrically coupled to the common connector (20) and may be adapted to electrically float with respect to a varying beam voltage, and may be electrically referenced between the varying beam voltage and a local electrical ground of the gating circuitry (32).