MALFUNCTIONING-FACTOR EVALUATION SUPPORTING APPARATUS AND SUBSTRATE EXCHANGING METHOD

摘要

The unnecessary replacement of a motor€”namely, when the motor has not failed€” is prevented. A failure factor determination support apparatus (13) comprises an operating power supply unit (14) and a voltage detection unit (15). The operating power supply unit (14) generates an operating power supply and supplies such to a motor driver IC (52), which both controls the drive of a motor (51) and determines whether the motor (51) is in the faulty rotation state. The voltage detection unit (15) detects a voltage value ( Vcc ) of the operating power supply if the motor driver IC (52) has determined that the motor (51) is in the faulty rotation state.