DEVICE WITH ELASTIC SURFACE WAVES COMPRISING A SINGLE-CRYSTAL PIEZOELECTRIC FILM AND A CRYSTALLINE SUBSTRATE, WITH LOW VISCOELASTIC COEFFICIENTS

摘要

A surface elastic wave device comprises a stack including: a thin film made of a piezoelectric first material; a substrate made from a second material; and exciting means for generating at least one surface acoustic wave propagation mode in the piezoelectric film; wherein: the first material is a single-crystal material and the second material is a crystalline material, the thickness of the thin film of piezoelectric first material being smaller than or equal to 20 μm, and the first material and the second material having viscoelastic coefficients lower than or equal to those of quartz for the propagation mode induced by the exciting means.