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MICROSENSOR BODY AND METHOD FOR MANUFACTURING SAME, AND MICROSENSOR
MICROSENSOR BODY AND METHOD FOR MANUFACTURING SAME, AND MICROSENSOR
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机译:显微镜体及其制造方法,以及显微镜
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摘要
The present invention relates to the field of sensor manufacturing technology, particularly disloses a method for manufacturing a micro-sensor body, compriseing the steps of S1: applying a wet colloidal material on a substrate to form a colloidal layer, and covering a layer of one-dimensional nanowire film on the surface of the colloidal layer to form a sensor embryo; S2: drying the colloidal layer of the sensor embryo to an extent that the colloidal layer cracks into a plurality of colloidal islands, a portion of the one-dimensional nanowire film contracting into a contraction diaphragm adhered to the surface of the colloidal islands while the other portion of the one-dimensional nanowire film being stretched into a connection structure connected between the adjacent contraction diaphragms. By the method for manufacturing a micro-sensor body of the present invention, the contraction diaphragms and connection structures formed by stretching the one-dimensional nanowire film are connected stably, which enhances the stability of the sensor devices; and the cracking manner renders it easy to obtain a large-scale of sensor bodies with connection structure arrays in stable suspension.
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