首页> 外国专利> COMPRESSION MOLDED ARTICLES EMPLOYING CIRCUMFERENTIAL SURFACES HAVING FRICTION-ENHANCING PATTERNS TO CONTACT SUBSTRATES DURING WET CHEMICAL PROCESSES

COMPRESSION MOLDED ARTICLES EMPLOYING CIRCUMFERENTIAL SURFACES HAVING FRICTION-ENHANCING PATTERNS TO CONTACT SUBSTRATES DURING WET CHEMICAL PROCESSES

机译:压缩模制品,采用带有摩擦力增强型图案的周向表面,以与湿化学过程中的基材接触

摘要

Compression molded articles employing circumferential surfaces having friction-enhancing patterns to contact substrates during wet chemical processes are disclosed. An article such as an annular body may be formed by a compression molding technique. By including a patterned surface as part of an outer circumferential surface of the annular body, frictional contact between the annular body and the substrate may be enhanced as friction-reducing fluids associated with a wet chemical processes may be directed away from the desired friction contact area between the annular body and the substrate. In this manner, frictional contact may be enhanced and the substrate may be effectively positioned and moved during the wet chemical process to improve the effectively of the process.
机译:公开了采用湿式化学过程期间具有摩擦增强图案的圆周表面接触基材的压缩模塑制品。诸如环形体的制品可以通过压缩成型技术形成。通过将图案化的表面包括为环形主体的外周表面的一部分,可以增强环形主体与基板之间的摩擦接触,因为与湿化学工艺相关的减少摩擦的流体可以被引导远离期望的摩擦接触区域。在环形体和基板之间。以这种方式,可以在湿化学工艺期间增强摩擦接触并且可以有效地定位和移动基板,以提高工艺效率。

著录项

  • 公开/公告号EP3254306A1

    专利类型

  • 公开/公告日2017-12-13

    原文格式PDF

  • 申请/专利权人 APPLIED MATERIALS INC.;

    申请/专利号EP20160746947

  • 发明设计人 ALVAREZ DAVID;ATKINSON JIM K.;

    申请日2016-01-15

  • 分类号H01L21/304;

  • 国家 EP

  • 入库时间 2022-08-21 13:16:52

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