CATHODOLUMINESCENCE DETECTOR FOR USE IN A CHARGED PARTICLE MICROSCOPE

摘要

A charged particle microscope having a vacuum chamber comprising:- A sample holder, for holding a sample;- A source, for producing a probing beam of charged particles;- An illuminator, for directing said beam along an axis so as to irradiate the sample, also comprising:- A detector, for simultaneous detection of multiple wavelengths in a polychromatic flux of photonic radiation emanating from the sample in response to said irradiation,which detector comprises:- A plurality of photosensitive surfaces, each of which produces an output signal in response to detected photonic radiation; and- A plurality of optical filters, with mutually differing transmission characteristics, each associated with a respective one of said photosensitive surfaces and serving to filter photonic radiation falling thereon.