METHODS OF FABRICATING CHANNELS IN GLASS ARTICLES BY LASER DAMAGE AND ETCHING AND ARTICLES MADE THEREFROM

摘要

A method for forming a glass article and the corresponding glass article are provided. The method for forming a glass article includes providing a glass substrate sheet, and translating a pulsed laser beam on the glass substrate sheet. The pulsed laser forms a laser damage region extending from first surface of the glass substrate sheet a mid-point of the glass substrate sheet. The method further includes contacting the glass substrate sheet with an etchant solution to form channels at the laser damage region, the channels having width and depth dimensions of less than 150 μm. The glass article includes a first surface, a second surface, a channel extending from the first surface to point between the first surface and the second surface. The channel has width and height dimensions less than about 150 μm.