MEASURED HEIGHT CORRECTION RULE GENERATING DEVICE AND METHOD, AND HEIGHT MEASURING DEVICE AND METHOD

摘要

PROBLEM TO BE SOLVED: To provide a measured height correction rule generating device and method, and a height measuring device and method.;SOLUTION: The measured height correction rule generating method comprises the phases of: acquiring first data including a height from a reference plane 50 at one or more positions on a sample 40A; generating a first mask including a scale factor relating to the height of a first position among the one or more positions, the scale factor being determined based on a relative relation between the height of the first position and a reference height; generating a second mask including a first correction rule relating to the height of the first position, the first correction rule being determined based on a relative relation between the height of the first position and a height of one or more second positions adjacent to the first position; and calculating a ratio of the height of the fist position to the height of a third position which is in an already set relation with the first position and generating a third mask including a second correction rule relating to the height of the first position, the second correction rule being determined based on a relative relation between the calculated ratio and an average ratio.;SELECTED DRAWING: Figure 2;COPYRIGHT: (C)2018,JPO&INPIT