MAINTENANCE TIME PREDICTING DEVICE, FLOW RATE CONTROLLER, AND MAINTENANCE TIME PREDICTING METHOD

摘要

PROBLEM TO BE SOLVED: To predict a maintenance time to be required for a flow rate controller and related equipment thereof.SOLUTION: A maintenance time predicting device comprises: a valve opening degree acquisition unit 3 that acquires an opening degree of a valve when a flow rate of fluid is maintained to be a predetermined target flow rate under the control of the flow rate for controlling the flow rate of the fluid using the valve; and an uncontrollable time estimation unit 4 that estimates time until the flow rate of the fluid falls into an uncontrollable state where it is unable to maintain the target flow rate on the basis of a function that approximates the relationship between the opening degree of the valve and the flow rate of the fluid and of a variation of the opening degree of the valve obtained at a predetermined time interval.SELECTED DRAWING: Figure 4