THIN MEMBRANE ALLOY FOR STRAIN SENSOR EXCELLENT IN THERMAL STABILITY AT HIGH TEMPERATURES

摘要

PROBLEM TO BE SOLVED: To provide a thin membrane alloy for strain sensors having small TCR and TCS, small temporal change of resistance at high temperatures, and excellent in the thermal stability at high temperatures.SOLUTION: A thin membrane alloy for strain sensors represented by a general formula CrAlB(where, x and y represent atomic ratio (at.%), 1x20, 0≤y10) is provided. The thin membrane alloy preferably has the temporal change of resistance of 20 ppm/°C or smaller, and both of TCR and TCS or any one thereof in the range of -200 to +200 ppm/°C. Furthermore, the specific resistance is preferable to be 250 μΩ cm or larger.SELECTED DRAWING: Figure 2